Processing apparatus
AssigneeDisco Corporation
InventorsYoshinobu Saito, Yoshikuni Migiyama
Life of this patent
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Abstract
A processing apparatus includes a chuck table having a holding surface for holding a workpiece; a horizontal moving mechanism that moves the chuck table in a horizontal direction and is supplied with a first oil; and a vertical moving mechanism that moves a processing unit in a vertical direction and is supplied with a second oil. Before mounting the workpiece on the holding surface, the holding surface is imaged by a camera while being irradiated with light, and it is examined whether or not the picked-up image is emitting light. If there is a light-emitting part in the picked-up image, it is determined that oil is adhered to the light-emitting part.
Claims3
A processing apparatus comprising:
- a chuck table having a holding surface for holding a workpiece;
- a processing unit that processes the workpiece held on the holding surface;
- a horizontal moving mechanism that moves the chuck table in a horizontal direction relative to the processing unit and is supplied with a first oil containing first photoluminescence particles;
- a vertical moving mechanism that moves the processing unit in a vertical direction relative to the chuck table and is supplied with a second oil containing second photoluminescence particles;
- a camera that images the holding surface of the chuck table;
- and
- a light source that casts light to an imaging area of the camera inclusive of the holding surface,
- wherein presence or absence of adhesion of the first oil and/or the second oil to the holding surface can be detected based on an image of the holding surface picked up by the camera.
Dependencies are inferred from the claim text.