Laterally excited bulk wave device with acoustic mirrors

A stacked acoustic wave device assembly comprising:

• a first support substrate;
• a first laterally excited bulk acoustic wave stack on the first support substrate;
• the first laterally excited bulk acoustic wave stack including a first piezoelectric layer, a first interdigital transducer electrode on the first piezoelectric layer, and a pair of solid acoustic mirrors on opposing sides of the first piezoelectric layer;
• a second support substrate positioned on the first laterally excited bulk acoustic wave stack;
• and
• a second laterally excited bulk acoustic wave stack on the second support substrate, the second laterally excited bulk acoustic wave stack including a second piezoelectric layer, a second interdigital transducer electrode on the second piezoelectric layer, and a solid acoustic mirror positioned between the second piezoelectric layer and the second support substrate.

A laterally excited bulk acoustic wave component comprising:

• a first substrate;
• a first solid acoustic mirror on the first substrate;
• a piezoelectric layer on the first solid acoustic mirror;
• an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode arranged to laterally excite a bulk acoustic wave;
• a second solid acoustic mirror on the piezoelectric layer and the interdigital transducer electrode, the first solid acoustic mirror and the second solid acoustic mirror together arranged to confine acoustic energy of the bulk acoustic wave;
• and
• a second substrate on the second solid acoustic mirror, the first and second solid acoustic mirrors being positioned between the first and second substrates, the first and second substrates arranged to dissipate heat associated with the bulk acoustic wave.

A laterally excited bulk acoustic wave device comprising:

• a first solid acoustic mirror;
• a second solid acoustic mirror;
• a piezoelectric layer positioned between the first solid acoustic mirror and the second solid acoustic mirror, the piezoelectric layer having a thickness in a range from 0.2 micrometers to 0.4 micrometers;
• an interdigital transducer electrode on the piezoelectric layer, the interdigital transducer electrode arranged to laterally excite a bulk acoustic wave, the first solid acoustic mirror and the second solid acoustic mirror arranged to confine acoustic energy of the bulk acoustic wave;
• and
• a support substrate arranged to dissipate heat associated with the bulk acoustic wave, the first solid acoustic mirror being positioned on the support substrate.