Infrared detector and imaging device using the same
AssigneeFujitsu Limited
InventorKoji Tsunoda
Life of this patent
Estimating the term…
Abstract
An infrared detector includes: a first light receiving layer having a first cutoff wavelength; a second light receiving layer having a second cutoff wavelength longer than the first cutoff wavelength; an intermediate filter layer having a third cutoff wavelength that is the same as or longer than the first cutoff wavelength and the same as or shorter than the second cutoff wavelength, the intermediate filter layer being disposed between the first light receiving layer and the second light receiving layer; a first barrier layer disposed between the first light receiving layer and the intermediate filter layer; and a second barrier layer disposed between the second light receiving layer and the intermediate filter layer.
Claims8
An infrared detector comprising:
- a first light receiving layer having a first cutoff wavelength;
- a second light receiving layer having a second cutoff wavelength longer than the first cutoff wavelength;
- an intermediate filter layer having a third cutoff wavelength that is the same as or longer than the first cutoff wavelength and the same as or shorter than the second cutoff wavelength, the intermediate filter layer being disposed between the first light receiving layer and the second light receiving layer;
- a first barrier layer disposed between the first light receiving layer and the intermediate filter layer;
- and
- a second barrier layer disposed between the second light receiving layer and the intermediate filter layer,
- impurity concentrations of the intermediate filter layer, the first barrier layer, and the second barrier layer are lower than impurity concentrations of the first light receiving layer and the second light receiving layer.
An infrared detector comprising:
- a first light receiving layer having a first cutoff wavelength;
- a second light receiving layer having a second cutoff wavelength longer than the first cutoff wavelength;
- an intermediate filter layer having a third cutoff wavelength that is the same as or longer than the first cutoff wavelength and the same as or shorter than the second cutoff wavelength, the intermediate filter layer being disposed between the first light receiving layer and the second light receiving layer;
- a first barrier layer disposed between the first light receiving layer and the intermediate filter layer;
- and
- a second barrier layer disposed between the second light receiving layer and the intermediate filter layer,
- the first light receiving layer, the second light receiving layer, the intermediate filter layer, the first barrier layer, and the second barrier layer have a same conductivity type.
An imaging device comprising:
- an infrared detector;
- and
- a signal processing circuit,
- wherein the infrared detector includes
- a first light receiving layer having a first cutoff wavelength,
- a second light receiving layer having a second cutoff wavelength longer than the first cutoff wavelength,
- an intermediate filter layer having a third cutoff wavelength that is the same as or longer than the first cutoff wavelength and the same as or shorter than the second cutoff wavelength, the intermediate filter layer being disposed between the first light receiving layer and the second light receiving layer,
- a first barrier layer disposed between the first light receiving layer and the intermediate filter layer,
- a second barrier layer disposed between the second light receiving layer and the intermediate filter layer,
- a pixel array in which a plurality of light receiving elements, in which the first light receiving layer, the first barrier layer, the intermediate filter layer, the second barrier layer, and the second light receiving layer are laminated in this order, is arranged, and
- a reading circuit bonded to the pixel array,
- the first light receiving layer, the second light receiving layer, the intermediate filter layer, the first barrier layer, and the second barrier layer have a same conductivity type,
- the signal processing circuit is configured to be connected to an output of the reading circuit.
Dependencies are inferred from the claim text.