Method and apparatus for processing oxygen-containing workpiece

A method of processing an oxygen-containing workpiece, the method comprising:

• controlling a fluorine concentration in the oxygen-containing workpiece based on at least one of a kind of a fluorine-containing processing gas, a processing temperature and a processing pressure used for processing the oxygen-containing workpiece,
• wherein the controlling a fluorine concentration includes selecting whether the fluorine-containing processing gas in a non-plasma state is supplied to the oxygen-containing workpiece or the fluorine-containing processing gas is activated by a remote plasma and supplied to the oxygen-containing workpiece as a fluorine-containing processing radical, and
• wherein the controlling a fluorine concentration in the oxygen-containing workpiece is performed such that the fluorine concentration in the oxygen-containing workpiece becomes higher by increasing the processing temperature used for processing the oxygen-containing workpiece.