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US 11,548,208 B2Granted
Template, method for manufacturing template, and pattern formation method
AssigneeKioxia Corporation
InventorsKoji Asakawa, Shinobu Sugimura
Life of this patent
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Abstract
According to one embodiment, a template includes a base body, and a first film. The base body has a first surface and a second surface. The first surface includes silicon oxide and spreads along a first plane. The second surface crosses the first plane. The first film includes aluminum oxide. A direction from the second surface toward the first film is aligned with a direction perpendicular to the second surface. A thickness of the first film along the direction perpendicular to the second surface is not less than 0.3 nm and not more than 10 μm. The first surface includes an unevenness.
Claims4
A template, comprising:
- a base body having a first surface and a second surface, the first surface including silicon oxide and spreading along a first plane, the second surface crossing the first plane;
- a first film including aluminum oxide;
- and
- an intermediate film including silicon as a main component, the intermediate film being positioned between the second surface and the first film,
- a direction from the second surface toward the first film being aligned with a direction perpendicular to the second surface,
- a thickness of the first film along the direction perpendicular to the second surface being not less than 0.3 nm and not more than 10 μm,
- the first surface including an unevenness.
4 more elements
Dependencies are inferred from the claim text.