Method for inspecting insertion states of plurality of pins included in connector inserted into substrate, and substrate inspection apparatus

A substrate inspection apparatus for inspecting insertion states of a plurality of pins included in each of a plurality of first connectors inserted into respective holes of a first substrate, comprising:

• a communication circuit configured to communicate with a connector insertion apparatus, the connector insertion apparatus configured to insert the plurality of first connectors including the plurality of pins into the holes of the first substrate;
• a plurality of light sources configured to emit pattern light on a first surface of the first substrate into which the pins of the plurality of first connectors are inserted by the connector insertion apparatus, the plurality of first connectors being inserted into the holes from a second surface of the first substrate opposite the first surface;
• an image sensor configured to receive the pattern light reflected from a pin tail of each of the plurality of pins included in each of the plurality of first connectors;
• at least one memory configured to store insertion reference information indicating a pin tail reference height and a pin tail reference position set for each of the plurality of pins included in each of the plurality of first connectors;
• and
• at least one processor,
• wherein the at least one processor is configured to:
• generate insertion state information indicating an insertion state of each of the plurality of pins included in each of the plurality of first connectors by using the pattern light reflected from the pin tail of each of the plurality of pins included in each of the plurality of first connectors and received by the image sensor;
• detect at least one second connector having an insertion defect from among the plurality of first connectors by using the insertion reference information and the insertion state information of each of the plurality of pins included in each of the plurality of first connectors;
• generate a control signal for adjusting at least one first process parameter among a plurality of process parameters of the connector insertion apparatus, based on the insertion state information of each of the plurality of pins included in the at least one second connector;
• and
• control the communication circuit to transmit the control signal to the connector insertion apparatus.