Resonator electrode shields
AssigneeSiTime Corporation
InventorsDavid Raymond Pedersen, Aaron Partridge, Thor Juneau
Life of this patent
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Abstract
A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.
Claims19
A semiconductor device comprising:
- a support element;
- a microelectromechanical system (MEMS) resonator, the MEMS resonator comprising a first body and a second body, the first body embodied as a beam and having a flexure portion and an active portion, motion of which is to be sensed, the flexure portion of the first body operatively coupling the active portion to the support element, and the second body also embodied as a beam and having a flexure portion and an active portion, motion of which is to be sensed, the flexure portion of the second beam operatively coupling the active portion of the second beam to the support element, first beam and the second beam being parallel to one another when at rest;
- at least one electrode to cause each of the first body and the second body to deflect during operation of the semiconductor device;
- and
- a conductive element to be tied to a predetermined potential, the conductive element disposed between the first body and the second body so as to impede electrostatic coupling between the first body and the second body.
A semiconductor device comprising:
- a support element;
- a microelectromechanical system (MEMS) resonator, the MEMS resonator comprising a first body and a second body, the first body embodied as a beam and having a flexure portion and an active portion, motion of which is to be sensed, the flexure portion of the first body operatively coupling the active portion to the support element, and the second body also embodied as a beam and having a flexure portion and an active portion, motion of which is to be sensed, the flexure portion of the second beam operatively coupling the active portion of the second beam to the support element, first beam and the second beam being parallel to one another when at rest;
- at least one electrode to cause each of the first body and the second body to deflect during operation of the semiconductor device, the deflection comprising vibration at a resonant frequency induced by application of a time-varying electronic signal;
- and
- a conductive element to be tied to a ground potential, the conductive element disposed between the first body and the second body so as to impede interference with the resonant frequency arising from existence of an electrostatic coupling between the first body and the second body.
A method of fabricating a semiconductor device, the method comprising:
- providing a support element;
- providing a microelectromechanical system (MEMS) resonator having a first body and a second body, the first body embodied as a beam and having a flexure portion and an active portion, motion of which is to be sensed, the flexure portion of the first body operatively coupling the active portion to the support element, and the second body also embodied as a beam and having a flexure portion and an active portion, motion of which is to be sensed, the flexure portion of the second beam operatively coupling the active portion of the second beam to the support element, first beam and the second beam being parallel to one another when at rest;
- providing at least one electrode to cause each of the first body and the second body to deflect during operation of the semiconductor device;
- and
- providing a conductive element to be tied to a predetermined potential, the conductive element disposed between the first body and the second body so as to impede electrostatic coupling between the first body and the second body.
Dependencies are inferred from the claim text.