Air pressure control device
AssigneeSemes Co., Ltd.
InventorsChung Woo Lee, In Kyu Park, Yong Seok Jang, Sung Youn Jeon
Life of this patent
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Abstract
Disclosed is an air pressure control (APC) device according to an embodiment of the inventive concept. The air pressure control (APC) device may include a processing chamber, a plate for adjusting a pressure in the processing chamber, and an APC valve including first and second step motors for adjusting a height of the plate, and an APC controller that controls the APC valve, and the APC controller may include a first controller that controls positions of the first step motor and the second step motor; and a second controller that compensates for a difference in position between the first step motor and the second step motor.
Claims12
An air pressure control (APC) device comprising:
- a processing chamber;
- a plate configured to adjust a pressure in the processing chamber;
- an APC valve including first and second step motors for adjusting a height of the plate;
- and
- an APC controller configured to control the APC valve,
- wherein the APC controller includes
- a first controller configured to control positions of the first step motor and the second step motor;
- and
- a second controller configured to compensate for a difference in position between the first step motor and the second step motor.
An air pressure control (APC) device comprising:
- a processing chamber;
- a plate configured to adjust a pressure in the processing chamber;
- an APC valve including first and second step motors for adjusting a height of the plate;
- and
- an APC controller configured to control the APC valve,
- wherein the APC controller is configured to:
- calculate target positions of the first step motor and the second step motor based on the pressure in the processing chamber,
- calculate a first position of the first step motor and a second position of the second step motor,
- primarily control positions of the first step motor and the second step motor based on difference information between the target position and the first position, and
- compensate for an error between the first position and the second position which have been changed according to a result of the control based on the difference information and additionally control the second step motor based on the compensated difference information.
Dependencies are inferred from the claim text.