Mounting state informing apparatus and mounting state informing method
AssigneeTokyo Electron Limited
InventorsNaoto Hayasaka, Naoki Mihara, Kouko Yumura, Junsuke Hoshiya
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AssigneeTokyo Electron Limited
InventorsNaoto Hayasaka, Naoki Mihara, Kouko Yumura, Junsuke Hoshiya
Estimating the term…
A mounting state informing apparatus includes a database, an acquisition unit, a first specifying unit, a comparison unit and an output unit. The database stores information upon a mounting position and a direction of each of multiple components belonging to a processing apparatus. The acquisition unit acquires first appearance data, which is obtained by a 3D scanner, indicating a state of an appearance of the processing apparatus. The first specifying unit identifies the multiple components based on the first appearance data and specifies a mounting position and a direction of each of the identified components. The comparison unit compares the specified mounting position and the specified direction of each of the identified components with the information upon the mounting position and the direction stored in the database. The output unit is configured to output a comparison result obtained by the comparison unit.
A mounting state informing apparatus, comprising:
A mounting state informing method of informing a mounting state of multiple components mounted to a processing apparatus, the mounting state informing method comprising:
Dependencies are inferred from the claim text.