Developer critical dimension control with pulse development
AssigneeInternational Business Machines Corporation
InventorsRichard C. Johnson, Hao Tang, Yongan Xu
Life of this patent
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Abstract
Embodiments of the invention include methods and structures for controlling developer critical dimension (DCD) variations across a wafer surface. Aspects of the invention include an apparatus having developer tubing and an internal cam. The internal cam is coupled to a fixed axis. A flexible divider is positioned between the developer tubing and the internal cam. The flexible divider is coupled to the internal cam such that rotation of the internal cam about the fixed axis is operable to change an inner diameter of the developer tubing.
Claims15
An apparatus for controlling developer critical dimension (DCD) variations across a wafer surface, the apparatus comprising:
- a developer controller;
- developer tubing;
- an internal cam coupled to a fixed axis, the internal cam comprising a non-uniform radius, the internal cam communicatively coupled to the developer controller;
- and
- a flexible divider between the developer tubing and the internal cam;
- wherein the flexible divider is coupled to the internal cam such that rotation of the internal cam about the fixed axis variably depresses the flexible divider into the developer tubing to change an inner diameter of the developer tubing through which developer flows;
- and
- wherein the developer controller is configured to linearly and parabolically change a flow rate of the developer by actuating the internal cam.
A system for controlling developer critical dimension (DCD) variations across a wafer surface, the system comprising:
- an apparatus comprising:
- developer tubing;
- an internal cam coupled to a fixed axis, the internal cam comprising a non-uniform radius, the internal cam communicatively coupled to a developer controller;
- and
- a flexible divider between the developer tubing and the internal cam, the flexible divider coupled to the internal cam such that rotation of the internal cam about the fixed axis variably depresses the flexible divider into the developer tubing to change an inner diameter of the developer tubing through which developer flows;
- a developer module arm comprising a nozzle, the developer module arm actuatable over the wafer surface, the nozzle coupled to an end of the developer tubing;
- and
- the developer controller comprising a processor configured to:
- position the nozzle over a first region of the wafer surface;
- and
- generate a cam control signal to rotate the internal cam to a first position corresponding to a first inner diameter of the developer tubing;
- wherein the developer controller is configured to linearly and parabolically change a flow rate of the developer by actuating the internal cam.
Dependencies are inferred from the claim text.