Sensor misalignment measuring device
AssigneeInvenSense, Inc.
InventorsIlya Gurin, Leonardo Baldasarre
Life of this patent
Estimating the term…
Abstract
The present disclosure relates to measuring misalignment between layers of a semiconductor device. In one embodiment, a device includes a first conductive layer; a second conductive layer; one or more first electrodes embedded in the first conductive layer; one or more second electrodes embedded in the second conductive layer; a sensing circuit connected to the one or more first electrodes; and a plurality of time-varying signal sources connected to the one or more second electrodes, wherein the one or more first electrodes and the one or more second electrodes form at least a portion of a bridge structure that exhibits an electrical property that varies as a function of misalignment of the first conductive layer and the second conductive layer in an in-plane direction.
Claims20
A device, comprising:
- a first conductive layer;
- a second conductive layer;
- one or more first electrodes embedded in the first conductive layer;
- two or more second electrodes embedded in the second conductive layer;
- a sensing circuit connected to each of the one or more first electrodes and at least one of the two or more second electrodes;
- and
- a voltage source connected to at least one electrode of the two or more second electrodes,
- wherein the one or more first electrodes and the two or more second electrodes form at least a portion of a bridge structure that exhibits an electrical property as measured by the sensing circuit in response to application of the voltage source connected to the at least one electrode of the two or more second electrodes, and wherein the electrical property varies as a function of misalignment of the first conductive layer and the second conductive layer in an in-plane direction.
Dependencies are inferred from the claim text.