Film bulk acoustic resonator
AssigneeWuhan Yanxi Micro Components Co., Ltd.
InventorsPei-Chun Liao, Re-Ching Lin, Junwu Zhao
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Abstract
The invention provides a film bulk acoustic resonator including a layered structure composed of a top electrode, a piezoelectric layer and a bottom electrode, and a substrate; a reflective interface is arranged between the bottom electrode and the substrate; and by defining the shape of all or part of the layered structure, the purpose of suppressing the lateral mode can be achieved, and without adding new process, the manufacturing cost of the device can be controlled, and the benefit of product development can be maximized.
Claims17
A film bulk acoustic resonator, comprising a layered structure composed of a top electrode, a piezoelectric layer and a bottom electrode, and a substrate, characterized in that a reflective interface is arranged between the bottom electrode and the substrate;
- the outer perimeter of the layered structure is a closed line formed by connecting a curve and at least one straight line segment,
- wherein at least one layer of the bottom electrode, the piezoelectric layer and the top electrode is provided with at least one protruding block, and
- wherein the at least one protruding block is disposed on a surface of an original structure of the at least one layer, such that a thickness of the at least one layer at a location in which the at least one protruding block is located is greater than a thickness of the original structure, or the at least one protruding block is disposed at a periphery of the original structure of the at least one layer and on a surface of a lower layer on which the original structure of the at least one layer is formed, and is connected with or at a distance from the original structure.
A film bulk acoustic resonator, comprising a substrate, a bottom electrode, a piezoelectric layer ad a top electrode which are sequentially arranged from bottom to top, wherein, a reflective interface is arranged between the substrate and the bottom electrode, and characterized in that at least one layer of the bottom electrode, the piezoelectric layer and the top electrode has a different shape from the other layers,
- wherein at least one layer of the bottom electrode, the piezoelectric layer and the top electrode is provided with at least one protruding block, and
- wherein the at least one protruding block is disposed on a surface of an original structure of the at least one layer, such that a thickness of the at least one layer at a location in which the at least one protruding block is located is greater than a thickness of the original structure, or the at least one protruding block is disposed at a periphery of the original structure of the at least one layer and on a surface of a lower layer on which the original structure of the at least one layer is formed, and is connected with or at a distance from the original structure.
Dependencies are inferred from the claim text.