Quantum dot slab-coupled optical waveguide emitters

A method of fabricating a slab-coupled optical waveguide (SCOW) emitter, the method comprising:

• forming a first cladding layer over a semiconductor substrate;
• forming alignment features in the semiconductor substrate;
• forming a first optical waveguide over the first cladding layer, wherein the first optical waveguide is doped with a first conductivity type;
• forming a plurality of quantum dots in an optically active region disposed above the first optical waveguide;
• forming a second optical waveguide over the optically active region, wherein the second optical waveguide is doped with a different, second conductivity type;
• and
• forming a second cladding layer over the second optical waveguide.

An optical system comprising:

• a photonic chip comprising:
• an optical component having a first height relative to a first surface;
• a semiconductor substrate having a second surface and defining mechanical features relative to the second surface;
• and
• a slab-coupled optical waveguide (SCOW) emitter contacting the second surface, the SCOW emitter comprising:
• an optical waveguide having a second height relative to the second surface, wherein the optical waveguide is optically coupled with the optical component when the mechanical features are contacted with corresponding portions of the photonic chip, the optical waveguide comprising:
• a first region doped with a first conductivity type;
• a second region doped with a different, second conductivity type;
• and
• an optically active region disposed between the first region and the second region, the optically active region comprising a plurality of quantum dots,
• wherein, when the first surface makes contact with the second surface, the optical waveguide is optically aligned with the optical component in at least one dimension.