Surface emitting laser and method of manufacturing the same

A method for manufacturing a surface emitting laser comprising steps of:

• forming a lower reflector layer, an active layer, and an upper reflector layer on a substrate in order;
• forming a high-resistance region by implanting ions into a portion of the lower reflector layer, the active layer, and the upper reflector layer;
• forming a mesa, a terrace, and a connecting portion from the lower reflector layer, the active layer, and the upper reflector layer;
• forming a current confinement structure in the mesa;
• and
• forming a wiring on each of a top surface of the terrace, the connecting portion, and the mesa,
• wherein the terrace and the connecting portion include the high-resistance region,
• a first groove is provided between the mesa and the terrace,
• the connecting portion connects the terrace and the mesa,
• the connecting portion extends in a direction inclined from <011> direction of the substrate, and
• the step of forming the current confinement structure includes a step of oxidizing a part of the upper reflector layer from a side surface of the mesa so as to form an aperture surrounded by an oxide region.