Methods of forming a memory cell comprising a metal chalcogenide material
AssigneeMicron Technology, Inc.
InventorsEugene P. Marsh, Stefan Uhlenbrock
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AssigneeMicron Technology, Inc.
InventorsEugene P. Marsh, Stefan Uhlenbrock
Estimating the term…
A method of forming a metal chalcogenide material. The method comprises introducing a metal precursor and a chalcogenide precursor into a chamber, and reacting the metal precursor and the chalcogenide precursor to form a metal chalcogenide material on a substrate. The metal precursor is a carboxylate of an alkali metal, an alkaline earth metal, a transition metal, a post-transition metal, or a metalloid. The chalcogenide precursor is a hydride, alkyl, or aryl precursor of sulfur, selenium, or tellurium or a silylhydride, silylalkyl, or silylaryl precursor of sulfur, selenium, or tellurium. Methods of forming a memory cell including the metal chalcogenide material are also disclosed, as are memory cells including the metal chalcogenide material.
A method of forming a memory cell, comprising:
A method of forming a memory cell, comprising:
A method of forming a memory cell, comprising:
Dependencies are inferred from the claim text.