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US 11,538,981 B2Granted
Vibration element, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsKenichi Kurokawa, Yukio Kitahara, Kazuo Tanaka
Life of this patent
Estimating the term…
Abstract
A vibration element includes: a base; a first arm continuous with the base; a second arm that is continuous with the base and is adjacent to the first arm; a first electrode disposed on the first arm, the second arm, and the base; a first piezoelectric layer that has a first polarity and that is disposed on the first electrode on the first arm; a second piezoelectric layer that has a second polarity different from the first polarity and that is disposed on the first electrode on the second arm; an insulating layer disposed on the first electrode on the base; and a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer.
Claims9
A vibration element comprising:
- a base;
- a first arm continuous with the base;
- a second arm that is continuous with the base and is adjacent to the first arm;
- a first electrode disposed on the first arm, the second arm, and the base;
- a first piezoelectric layer that has a first polarity and is disposed on the first electrode on the first arm;
- a first surface layer disposed between the first piezoelectric layer and the first electrode on the first arm;
- a second piezoelectric layer that has a second polarity different from the first polarity and is disposed on the first electrode on the second arm;
- a second surface layer disposed between the second piezoelectric layer and the first electrode on the second arm;
- an insulating layer disposed on the first electrode on the base;
- and
- a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer, wherein
- materials of the first piezoelectric layer and the second piezoelectric layer are the same, and
- materials of the first surface layer and the second surface are different from each other.
10 more elements
An electrical apparatus comprising:
- a vibration element including:
- a base,
- a first arm continuous with the base,
- a second arm that is continuous with the base and is adjacent to the first arm,
- a first electrode disposed on the first arm, the second arm, and the base,
- a first piezoelectric layer that has a first polarity and is disposed on the first electrode on the first arm,
- a first surface layer disposed between the first piezoelectric layer and the first electrode on the first arm,
- a second piezoelectric layer that has a second polarity different from the first polarity and is disposed on the first electrode on the second arm,
- a second surface layer disposed between the second piezoelectric layer and the first electrode on the second arm,
- an insulating layer disposed on the first electrode on the base, and
- a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer;
- an oscillation circuit that drives the vibration element;
- and
- a control circuit that operates based on a frequency signal output from the oscillation circuit, wherein
- material of the first piezoelectric layer and the second piezoelectric are the same, and
- materials of the first surface layer and the second surface layer different from each other.
13 more elements
A vehicle comprising:
- a vibration element including:
- a base,
- a first arm continuous with the base,
- a second arm that is continuous with the base and is adjacent to the first arm,
- a first electrode disposed on the first arm, the second arm, and the base,
- a first piezoelectric layer that has a first polarity and is disposed on the first electrode on the first arm,
- a first surface layer disposed between the first piezoelectric layer and the first electrode on the first arm,
- a second piezoelectric layer that has a second polarity different from the first polarity and is disposed on the first electrode on the second arm,
- a second surface layer disposed between the second piezoelectric layer and the first electrode on the second arm,
- an insulating layer disposed on the first electrode on the base, and
- a second electrode disposed on the first piezoelectric layer, the second piezoelectric layer, and the insulating layer;
- an oscillation circuit that drives the vibration element;
- and
- a control circuit that operates based on a frequency signal output from the oscillation circuit, wherein
- materials of the first piezoelectric layer and the second piezoelectric layer are the same, and
- materials of the first surface layer and the second surface layer are different from each other.
13 more elements
Dependencies are inferred from the claim text.