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US 11,538,977 B2Granted
Qubits with ion implant Josephson junctions
AssigneeInternational Business Machines Corporation
InventorsRyan T. Gordon, Kenneth P. Rodbell, Robert L. Sandstrom, Jeffrey W. Sleight
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Abstract
Techniques regarding qubit structures comprising ion implanted Josephson junctions are provided. For example, one or more embodiments described herein can comprise an apparatus that can include a strip of superconducting material coupling a first superconducting electrode and a second superconducting electrode. The strip of superconducting material can have a first region comprising an ion implant and a second region that is free from the ion implant.
Claims20
An apparatus, comprising:
- a strip of superconducting material coupling a first superconducting electrode on a substrate and a second superconducting electrode on the substrate, the strip of superconducting material having a first region comprising an ion implant and a second region that is free from the ion implant;
- and
- a sacrificial layer within a first portion of the substrate that is below a second portion of the strip of superconducting material comprising the first region.
A method, comprising:
- forming a Josephson junction of a superconducting qubit, wherein the forming comprises:
- forming a first superconducting electrode on a substrate,
- forming a second superconducting electrode on the substrate,
- forming a strip of superconducting material by depositing superconducting material onto the substrate that couples the first superconducting electrode to the second superconducting electrode, and
- implanting an ion into a region of the strip of superconducting material by depositing a metal mask onto the region of the strip of superconducting material, and exposing the metal mask to an ion beam.
2 more elements
A method, comprising:
- forming a sacrificial layer within a first portion of a substrate;
- forming a first superconducting electrode and a second superconducting electrode on the substrate;
- forming a strip of superconducting material that couples the first superconducting electrode to the second superconducting electrode, comprising depositing a second portion of the strip of superconducting material on the sacrificial layer;
- and
- forming a Josephson junction in the strip of superconducting material by implanting an ion into the strip of superconducting material.
2 more elements
Dependencies are inferred from the claim text.