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US 11,538,932 B2Granted
Semiconductor transistor device and method of manufacturing the same
AssigneeInfineon Technologies Austria AG
InventorLing Ma
Life of this patent
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Abstract
The present application relates to a semiconductor transistor device that includes a Schottky diode electrically connected in parallel to a body diode formed between a body region and a drift region. A diode junction of the Schottky diode is formed adjacent to the drift region and is arranged vertically above a lower end of the body region.
Claims14
A semiconductor transistor device, comprising:
- a source region;
- a drain region;
- a body region;
- a drift region comprising a drift zone vertically between the body region and the drain region;
- a gate region laterally aside the body region and configured to form a vertical channel in the body region;
- and
- a Schottky diode electrically connected in parallel to a body diode formed between the body region and the drift region,
- wherein a diode junction of the Schottky diode is formed adjacent to the drift region and is arranged vertically above a lower end of the body region,
- wherein the source region and the body region are arranged in an active cell of the semiconductor transistor device,
- wherein the diode junction of the Schottky diode is arranged in a diode cell of the semiconductor transistor device,
- wherein the active cell and the diode cell lie one aside the other in a first lateral direction,
- wherein an area of the diode junction of the Schottky diode has a share of at least 10% at an area of the diode cell.
9 more elements
A semiconductor transistor device, comprising:
- a source region;
- a drain region;
- a body region;
- a drift region comprising a drift zone vertically between the body region and the drain region;
- a gate region laterally aside the body region and configured to form a vertical channel in the body region;
- a Schottky diode electrically connected in parallel to a body diode formed between the body region and the drift region, a diode junction of the Schottky diode being formed adjacent to the drift region and is arranged vertically above a lower end of the body region;
- and
- field electrode regions which respectively extend vertically into the drift region and are arranged consecutively in a first lateral direction,
- wherein the diode junction of the Schottky diode extends in the first lateral direction over a whole distance between two neighboring ones of the field electrode regions,
- wherein the field electrode regions are respectively formed as a vertical needle in a vertical needle trench, and wherein the vertical needles are arranged consecutively in the first lateral direction and also in a second lateral direction,
- wherein the diode junction of the Schottky diode is arranged in a diode cell of the semiconductor transistor device,
- wherein an area of the diode junction of the Schottky diode has a share of at least 10% at an area of the diode cell.
9 more elements
Dependencies are inferred from the claim text.