Imaging sensor and pixel structure for simultaneous imaging and energy harvesting
AssigneeThe Regents of the University of Michigan
InventorsEuisik Yoon, Kyuseok Lee, Sung-Yun Park
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Abstract
An energy harvesting imaging sensor includes an array of pixel structures each formed from a semiconductor having a photodiode overlying a photovoltaic diode. The photodiode and photovoltaic diode are implemented as a vertically stacked P+/NWELL/PSUB junction. This structure enables simultaneous imaging and energy harvesting by generating charge in the photodiode that is indicative of light impinging on the photodiode and simultaneously generating charge from the light in the photovoltaic diode located underneath the photodiode.
Claims18
An imaging sensor, comprising:
- a substrate;
- a pixel array comprising a plurality of pixel structures formed on the substrate, wherein each of the pixel structures includes a P+/NWELL/PSUB junction forming a first, photodiode overlying a second, photovoltaic diode.
An energy harvesting imaging sensor comprising an array of P+/NWELL/PSUB junctions each forming a vertically stacked photodiode and photovoltaic diode pair.
An energy harvesting pixel imaging structure comprising a semiconductor having a photodiode overlying a photovoltaic diode.
A method of simultaneous imaging and energy harvesting, comprising the steps of generating charge in a photodiode indicative of light impinging on the photodiode and simultaneously generating charge from the light in a photovoltaic diode located underneath the photodiode.
Dependencies are inferred from the claim text.