Image sensing device
AssigneeSK hynix Inc.
InventorMin Su Cho
Life of this patent
Estimating the term…
Abstract
Designs of image sensing devices by including a substrate layer including a plurality of photoelectric conversion elements, a plurality of grid structures disposed over the substrate layer, a plurality of color filter layers each of which is disposed between adjacent grid structures, a plurality of over-coating layers formed over the color filter layers, and a plurality of microlenses formed over the over-coating layers. Each of the grid structures includes an air layer, and a capping film formed to cap the air layer, and an upper portion of the air layer is formed to protrude upward from the over-coating layer.
Claims14
An image sensing device comprising:
- a substrate layer including a plurality of photoelectric conversion elements;
- a plurality of grid structures disposed over the substrate layer and structured to provide optical isolation between adjacent photoelectric conversion elements;
- a plurality of color filter layers disposed over the substrate layer, each color filter layer being disposed between adjacent grid structures;
- a plurality of over-coating layers formed over the plurality of color filter layers, respectively;
- and
- a plurality of microlenses formed over the plurality of over-coating layers, respectively,
- wherein each of the plurality of grid structures includes:
- an air layer;
- and
- a capping film formed to cover the air layer,
- wherein an upper portion of the air layer is formed to protrude upward from the over-coating layer, and
- wherein the capping film is formed to extend to below the color filter layer to cover a bottom surface of the color filter layers.
An image sensing device comprising:
- a substrate layer including a plurality of photoelectric conversion elements;
- a plurality of grid structures disposed over the substrate layer and structured to provide optical isolation between adjacent photoelectric conversion elements;
- a plurality of color filter layers disposed over the substrate layer, each color filter layer being disposed between adjacent grid structures;
- and
- a plurality of lens layers disposed over the plurality of color filter layers, respectively,
- wherein each of the plurality of grid structures includes:
- an air layer;
- and
- a capping film formed to surround a top surface and a side surface of the air layer,
- wherein the capping film is formed to extend to below the color filter layer to cover a bottom surface of the color filter layers.
An image sensing device comprising:
- a substrate layer including a plurality of photoelectric conversion elements;
- a plurality of grid structures disposed over the substrate layer and structured to provide optical isolation between adjacent photoelectric conversion elements;
- a plurality of color filter layers disposed over the substrate layer, each color filter layer being disposed between adjacent grid structures;
- and
- a plurality of lens layers disposed over the plurality of color filter layers, respectively, such that a bottom portion of each lens layer is placed at a lower position than top portions of adjacent grid structures,
- wherein each of the plurality of grid structures includes:
- an air layer;
- and
- a capping film formed to surround a top surface and a side surface of the air layer,
- wherein the capping film is formed to extend to below the color filter layer to contact a bottom surface of the color filter layers.
Dependencies are inferred from the claim text.