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US 11,538,820 B2Granted
Memory device having vertical structure including a first wafer and a second wafer stacked on the first wafer
AssigneeSK hynix Inc.
InventorsSung Lae Oh, Sang Woo Park, Dong Hyuk Chae, Ki Soo Kim
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Abstract
A memory device is disclosed. The disclosed memory device may include a first wafer, and a second wafer stacked on and bonded to the first wafer. The first wafer may include a cell structure including a memory cell array; and a first logic structure disposed under the cell structure, and including a column control circuit. The second wafer may include a second logic structure including a row control circuit.
Claims19
A memory device comprising:
- a first wafer, and a second wafer stacked on and bonded to the first wafer,
- wherein the first wafer comprises:
- a cell structure including a memory cell array;
- and
- a first logic structure disposed under the cell structure, and including a column control circuit,
- wherein the second wafer comprises a second logic structure including a row control circuit,
- wherein the memory cell array comprises a stack structure that is disposed on a source plate in a cell region and a slimming region, and bit lines disposed over the stack structure,
- wherein the cell structure includes a source electrode that is coupled to the source plate through a contact structure passing through the stack structure, and
- wherein the source electrode is disposed in the cell region of a wiring layer between the bit lines and the second wafer.
6 more elements
Dependencies are inferred from the claim text.