Integrated circuit with an embedded inductor or transformer
AssigneeTexas Instruments Incorporated
InventorsBarry Jon Male, Rajarshi Mukhopadhyay
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AssigneeTexas Instruments Incorporated
InventorsBarry Jon Male, Rajarshi Mukhopadhyay
Estimating the term…
In a described example, an integrated circuit includes: a semiconductor substrate having a first surface and an opposite second surface; at least one dielectric layer overlying the first surface of the semiconductor substrate; at least one inductor coil in the at least one dielectric layer with a plurality of coil windings separated by coil spaces, the at least one inductor coil lying in a plane oriented in a first direction parallel to the first surface of the semiconductor substrate, the at least one inductor coil electrically isolated from the semiconductor substrate by a portion of the at least one dielectric layer; and trenches extending into the semiconductor substrate in a second direction at an angle with respect to the first direction, the trenches underlying the inductor coil and filled with dielectric replacement material.
A transformer, comprising:
A transformer, comprising:
Dependencies are inferred from the claim text.