Random cut patterning
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Wei Peng, Wei-Cheng Lin, Chih-Ming Lai, Jiann-Tyng Tzeng
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsShih-Wei Peng, Wei-Cheng Lin, Chih-Ming Lai, Jiann-Tyng Tzeng
Estimating the term…
Methods and devices are described herein for random cut patterning. A first metal line and a second metal line are formed within a cell of a substrate and extend in a vertical direction. A third metal line and a fourth metal line are formed within the cell and are perpendicular to the first metal line and the second metal line, respectively. A first circular region at one end of the first metal line is formed using a first patterning technique and a second circular region at one end of the second metal line is formed using a second patterning technique. The first circular region is laterally extended using a second patterning technique to form the third metal line and the second circular region is laterally extended using the second patterning technique to form the fourth metal line.
An semiconductor device comprising:
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