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US 11,538,715 B2Granted
Stage and substrate processing apparatus
AssigneeTokyo Electron Limited
InventorsRyo Chiba, Yasuharu Sasaki, Akira Nagayama
Life of this patent
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Abstract
The present invention provides a stage which comprises: a plate-shaped member having a mounting surface on which a workpiece to be processed is mounted and a rear surface facing the mounting surface, said plate-shaped member being provided with a through hole that penetrates through the mounting surface and the rear surface; and an embedded member disposed inside the through hole. This stage is configured such that the surface of the embedded member is provided with at least one of a concave portion and a convex portion.
Claims9
A stage comprising:
- a plate-shaped member having a mounting surface on which a workpiece is mounted, a rear surface facing the mounting surface, and a through hole penetrating through the mounting surface and the rear surface;
- and
- an embedded member disposed inside the through hole,
- wherein at least one of a concave portion and a convex portion is provided on a surface of the embedded member,
- wherein the at least one of the concave portion and the convex portion on the surface of the embedded member includes a plurality of protrusions and a spiral protrusion, and
- wherein the embedded member includes one of the plurality of protrusions and the spiral protrusion in a tip end portion of the embedded member, and includes the other of the plurality of protrusions and the spiral protrusion in a base end portion of the embedded member.
3 more elements
A substrate processing apparatus comprising:
- a processing container configured to process a workpiece therein;
- and
- a stage disposed in the processing container and configured to mount the workpiece,
- wherein the stage includes:
- a plate-shaped member having a mounting surface on which the workpiece is mounted, a rear surface facing the mounting surface, and a through hole penetrating through the mounting surface and the rear surface;
- and
- an embedded member disposed inside the through hole, and
- at least one of a concave portion and a convex portion is provided on a surface of the embedded member,
- wherein the at least one of the concave portion and the convex portion on the surface of the embedded member includes a plurality of protrusions and a spiral protrusion, and
- wherein the embedded member includes one of the plurality of protrusions and the spiral protrusion in a tip end portion of the embedded member, and includes the other of the plurality of protrusions and the spiral protrusion in a base end portion of the embedded member.
7 more elements
Dependencies are inferred from the claim text.