System and method for edge ring wear compensation
AssigneeLam Research Corporation
InventorsTom A. Kamp, Carlos Leal-Verdugo
Life of this patent
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Abstract
A controller for adjusting a height of an edge ring in a substrate processing system includes an edge ring wear calculation module configured to receive at least one input indicative of one or more erosion rates of the edge ring, calculate at least one erosion rate of the edge ring based on the at least one input, and calculate an amount of erosion of the edge ring based on the at least one erosion rate. An actuator control module is configured to adjust the height of the edge ring based on the amount of erosion as calculated by the edge ring wear calculation module.
Claims12
A controller for adjusting a height of an edge ring arranged around an outer portion of a substrate support in a substrate processing system, the controller comprising:
- an edge wear calculation module;
- and
- an actuator control module,
- wherein the edge ring wear calculation module is configured to
- receive, from a user interface, at least one input indicative of one or more erosion rates of the edge ring, wherein the at least one input includes a plurality of erosion rates for respective usage periods of the substrate processing system,
- determine at least one erosion rate of the edge ring using the plurality of erosion rates for the respective usage periods,
- monitor an overall usage of the edge ring and store the overall usage of the edge ring in a memory, and
- calculate an amount of erosion of the edge ring based on the determined at least one erosion rate and the overall usage of the edge ring, and
- wherein the actuator control module is configured to adjust the height of the edge ring based on the amount of erosion as calculated by the edge ring wear calculation module to compensate for the calculated amount of erosion.
Dependencies are inferred from the claim text.