Back to results
US 11,538,702 B2Granted
Apparatus for monitoring an exchanging process of a semiconductor part and a method for the same
AssigneeAdaptive Plasma Technology Corp.
InventorsWoo Hyung Choi, Sang Woo Lee
Life of this patent
Estimating the term…
Abstract
Provided is an apparatus for monitoring an exchanging process of a semiconductor part and a method for the same. The apparatus comprises finger having a structure capable of loading the part and transferred by a robot for exchanging; and at least one image obtaining means coupled to the finger and obtaining an image of an exchanging position.
Claims5
An apparatus for monitoring an exchanging process of a semiconductor part, comprising;
- a finger having a pair of hands formed at one end portion thereof and an image obtaining means disposed in each of the hands, the finger being configured to be coupled with a robot arm;
- a loading unit detachably attached on the finger, the loading unit being configured to load the semiconductor part;
- and
- a processor disposed in the loading unit and wirelessly connected to the image obtaining means, the processor being configured to process an image obtained by the image obtaining means to be a wireless transmittable data and wirelessly transmit the wireless transmittable data to an external controlling unit.
1 more element
Dependencies are inferred from the claim text.