Substrate processing apparatus and substrate processing method
AssigneeTokyo Electron Limited
InventorGo Ayabe
Life of this patent
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Abstract
There is provided a substrate processing apparatus, including: a mounting part on which a carrier having a plurality of slots capable of accommodating a plurality of substrates is mounted; a transfer part configured to load and unload the substrates to and from the plurality of slots based on a reference accommodation position set in the mounting part; a detection part configured to detect a position of each of the plurality of substrates accommodated in the plurality of slots; and a correction part configured to correct the reference accommodation position based on port accumulation information in which detection results obtained by the detection part from a plurality of carriers which has been mounted on the mounting part in the past are accumulated.
Claims7
A substrate processing apparatus, comprising:
- a mounting part on which a carrier having a plurality of slots capable of accommodating a plurality of substrates is mounted;
- a transfer part configured to load and unload the substrates to and from the plurality of slots based on a reference accommodation position set in the mounting part;
- a detection part configured to detect a height position of a substrate of the plurality of substrates accommodated in the plurality of slots;
- a correction part configured to correct the reference accommodation position based on port accumulation information in which height positions of substrates previously detected by the detection part from a plurality of carriers which has been mounted on the mounting part in the past are accumulated, by incorporating a discrepancy between the reference accommodation position before correction and the height positions of the port accumulation information into the reference accommodation position for the correction;
- a deterioration prediction part configured to, for each carrier, predict deterioration of the carrier based on carrier substrate position accumulation information in which the height positions of the substrates previously detected by the detection part are accumulated;
- and
- a notification part configured to notify deterioration of the carrier before the carrier predicted to be deteriorated by the deterioration prediction part is mounted on the mounting part again.
A substrate processing method, comprising:
- mounting, on a mounting part, a carrier having a plurality of slots capable of accommodating a plurality of substrates;
- loading and unloading the substrates to and from the plurality of slots based on a reference accommodation position set in the mounting part;
- detecting a height position of a substrate of the plurality of substrates accommodated in the plurality of slots using a detection part;
- correcting the reference accommodation position based on port accumulation information in which height positions of substrates previously detected by the detection part from a plurality of carriers which has been mounted on the mounting part in the past are accumulated, by incorporating a discrepancy between the reference accommodation position before correction and the height positions of the port accumulation information into the reference accommodation position for the correction;
- predicting, for each carrier, by a deterioration prediction part, deterioration of the carrier based on carrier substrate position accumulation information in which the height positions of the substrates previously detected in the detection step are accumulated;
- and
- notifying, by a notification part, deterioration of the carrier before the carrier predicted to be deteriorated by the deterioration prediction part is mounted on the mounting part again.
Dependencies are inferred from the claim text.