Method of electrochemically processing a substrate and integrated circuit device
AssigneeUniversité Catholique De Louvain
InventorsGilles Scheen, Jean-Pierre Raskin, Jonathan Rasson
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Abstract
A substrate has a front side including an electrical circuit and a rear side including an exposed zone that faces the electrical circuit. In an electrochemical treatment step, an electrical potential is laterally applied at least to the exposed zone of the rear side of the substrate, while the exposed zone is in contact with a chemically reactive substance. The electrical potential causes a lateral flow of electrical current at least in the exposed zone of the substrate. The lateral flow of current and the chemically reactive substance alter the substrate in at least the exposed zone.
Claims15
A method of processing a substrate having a front side comprising an electrical circuit and a rear side comprising an exposed zone that faces the electrical circuit, the method comprising:
- electrochemically treating the substrate by laterally applying an electrical potential at least to the exposed zone on the rear side of the substrate, while the exposed zone is in contact with a chemically reactive substance, the electrical potential causing an electrical current that flows laterally in the exposed zone and passes through the chemically reactive substance, so that the electrical current and the chemically reactive substance alter the substrate starting from the exposed zone on the rear side inwardly toward the front side.
Dependencies are inferred from the claim text.