Inductively coupled plasma spectrometric system and inductively coupled plasma spectrometric method
AssigneeNational Institute of Advanced Industrial Science and Technology
InventorsYoshiyuki Teramoto, Akihiro Wakisaka
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Abstract
Provided is an inductively coupled plasma spectrometric system for measuring an emission state of plasma into which a measurement target sample is fed, the inductively coupled plasma spectrometric system including: a spectrometer configured to resolve light emitted in a measurement region set in the plasma into a plurality of wavelength components; a detection device configured to detect a spatial distribution of the resolved light; and a measuring device configured to measure the detected spatial distribution at every measurement unit time, the measurement unit time being at least shorter than time required for the sample to pass through the measurement region.
Claims15
An inductively coupled plasma spectrometric system configured to measure an emission state of plasma into which a measurement target sample is fed, the inductively coupled plasma spectrometric system comprising:
- a sample feeder configured to intermittently feed the sample to the plasma;
- a spectrometer configured to resolve light emitted in a measurement region set in the plasma into a plurality of wavelength components;
- a detector configured to detect a spatial distribution of the resolved light as a two-dimensional image;
- and
- an image generator configured to generate time-series images at every measurement unit time during a course of movement of the sample in the measurement region, the measurement unit time being at least shorter than time required for the sample to pass through the measurement region;
- and
- an analyzer configured to:
- receive the time-series images from the image generator;
- and
- analyze a characteristic of the sample based on a light-intensity distribution obtained from the time-series images, the light-intensity distribution being a distribution with variables of a wavelength expressed by one component of an image coordinate, and a position of a moving path of the sample expressed by other component of the image coordinate, and a measurement time of the time-series images according to the measurement unit time.
An inductively coupled plasma spectrometric method for measuring an emission state of plasma into which a measurement target sample is fed, the inductively coupled plasma spectrometric method comprising:
- intermittently feeding the sample to the plasma,
- resolving light emitted in a measurement region set in the plasma into a plurality of wavelength components;
- detecting a spatial distribution of the resolved light as a two-dimensional image;
- generating time-series images at every measurement unit time during a course of movement of the sample in the measurement region, the measurement unit time being at least shorter than time required for the sample to pass through the measurement region;
- analyzing a characteristic of the sample based on a light-intensity distribution obtained from the time-series images, the light-intensity distribution being a distribution with variables of a wavelength expressed by one component of an image coordinate, and a position of a moving path of the sample expressed by other component of the image coordinate, and a measurement time of the time-series images according to the measurement unit time.
An inductively coupled plasma spectrometric system configured to measure an emission state of plasma into which a measurement target sample is fed, the inductively coupled plasma spectrometric system comprising:
- a sample feeder that is arranged above the plasma at a vertical direction of gravity and feeds the sample to the plasma;
- a spectrometer that resolves light emitted in a measurement region set in the plasma into a plurality of wavelength components;
- a camera that is coupled to an output of the spectrometer and obtains time-series images of two-dimensional images of the resolved light at every measurement unit time during a course of movement of the sample in the measurement region, the measurement unit time being at least shorter than time required for the sample to pass through the measurement region;
- and
- an analyzer that receives data of the time-series images from the camera;
- wherein the analyzer analyzes a characteristic of the sample based on a light-intensity distribution with variables of a wavelength (x), a position (y) of a moving path of the sample, and a measurement time (t) of the time-series images.
Dependencies are inferred from the claim text.