Plasma treatment apparatus and method

A plasma treatment apparatus, comprising:

• a workpiece holder for holding a workpiece;
• a vacuum tank for containing the workpiece holder, an interior of the vacuum tank configured to be evacuated;
• a plate-like blower panel to be a negative electrode, the blower panel having a plurality of blower holes for sending a process gas toward the workpiece held by the workpiece holder;
• and
• a positive electrode panel disposed between the blower panel and the workpiece holder, the positive electrode panel being constituted by arranging in series a plurality of rod-like electrodes parallel to a surface to be treated of the workpiece,
• wherein the workpiece has a plate shape, and a surface of the blower panel to be the negative electrode, the positive electrode panel, and the workpiece held on the workpiece holder are arranged in parallel,
• wherein a distance between the plate-like blower panel and the positive electrode panel is 50 mm and a distance between the workpiece and the positive electrode panel is 25 mm,
• wherein the vacuum tank includes an introduction port and an exhaust port of the process gas, the introduction port and the exhaust port configured to respectively introduce and exhaust the process gas in a direction perpendicular to the surface to be treated of the workpiece,
• wherein the plurality of rod-like electrodes includes:
• a first electrode;
• a second electrode located adjacent to the first electrode, an end of the second electrode being connected to the first electrode to circulate a coolant from the first electrode to the second electrode;
• and
• a third electrode located adjacent to the second electrode, another end of the second electrode being connected to the third electrode to circulate the coolant from the second electrode to the third electrode,
• wherein an entirety of the rod-like electrodes extending inside the vacuum tank is directly exposed to the workpiece and the surface of the blower panel, and
• wherein the plasma is configured to be generated between the positive electrode panel and the blower panel.