Theta stage mechanism and electron beam inspection apparatus
AssigneeNuFlare Technology, Inc.
InventorsTakahiro Murata, Toshikatsu Akiba, Yoshihiro Izumi
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Abstract
According to one aspect of the present invention, a θ stage mechanism includes a fixed shaft; a plurality of bearings in which outer rings roll on an outer peripheral surface of the fixed shaft; a plurality of cylindrical members supported in a state of being inserted inside inner rings of the plurality of bearings; and a table that is arranged on the plurality of cylindrical members and moves in a rotational direction about a center of the fixed shaft by the plurality of bearings rolling on an outer peripheral surface of the fixed shaft.
Claims10
A θ stage mechanism comprising:
- a fixed shaft;
- a plurality of bearings in which outer rings roll on an outer peripheral surface of the fixed shaft;
- a plurality of cylindrical members supported in a state of being inserted inside inner rings of the plurality of bearings;
- and
- a table that is arranged on the plurality of cylindrical members and moves in a rotational direction about a center of the fixed shaft by the plurality of bearings rolling on an outer peripheral surface of the fixed shaft.
An electron beam inspection apparatus comprising:
- a θ stage mechanism including
- a fixed shaft;
- a plurality of bearings in which outer rings roll on an outer peripheral surface of the fixed shaft;
- a plurality of cylindrical members supported in a state of being inserted inside inner rings of the plurality of bearings;
- and
- a table that is arranged on the plurality of cylindrical members and moves in a rotational direction about a center of the fixed shaft by the plurality of bearings rolling on an outer peripheral surface of the fixed shaft;
- an electron beam column configured to irradiate a substrate arranged on the θ stage mechanism with an electron beam;
- a detector configured to detect a secondary electron emitted from the substrate by irradiation of the electron beam;
- and
- a comparison circuit configured to compare an inspected image with a reference image, a secondary electron image based on detected data being used as the inspected image.
Dependencies are inferred from the claim text.