Alignment system and seal for positional alignment

An alignment system comprising:

• a sample carrier on which a sample is placed;
• a charged particle beam device including a charged particle optical system that irradiates the sample placed on the sample carrier with a charged particle beam, and a detector that detects a signal generated by irradiating the sample with the charged particle beam;
• an imaging device that images the sample placed on the sample carrier;
• an imaging device control unit that controls the imaging device;
• and
• an alignment controller to which a first image obtained by imaging the sample placed on the sample carrier by the imaging device and field-of-view information of the imaging device corresponding to the first image are input, wherein
• the imaging device control unit superimposes and displays a recommended position guide indicating recommended positions of a plurality of positional alignment points with respect to the sample carrier on an image of the sample carrier imaged by the imaging device, and
• the alignment controller includes
• an alignment data management unit that stores a plurality of second images obtained by imaging each of the plurality of positional alignment points set on the sample carrier by the imaging device using the recommended position guide and field-of-view information of the imaging device corresponding to each of the plurality of second images,
• a positional alignment point acquisition unit that acquires field-of-view information of the plurality of positional alignment points of the sample carrier placed on the charged particle beam device,
• an alignment processing unit that obtains a transformation matrix that transforms a coordinate system of the imaging device and a coordinate system of the charged particle beam device based on position information and magnification of each of the plurality of positional alignment points when the first image is imaged by the imaging device and position information and magnification of each of the plurality of positional alignment points acquired by the positional alignment point acquisition unit, and
• a field-of-view information calculation unit that transforms a field of view designated for the first image into field-of-view information of the charged particle beam device by using the transformation matrix.