Sample holder and charged particle beam device

#This application claims the benefit of Japanese Patent Application No. 2019-173703, filed Sep. 25, 2019, which is hereby incorporated by reference in their entirety into this application.

#The present invention relates to a sample holder and a charged particle beam device.

#Hitherto, there has been a demand for charged particle beam devices such as electron beam devices, focused ion-beam devices, or complex beam devices using a focused ion beam and an electron beam to perform so-called in-situ sample analyses of various types. For example, there have been known charged particle beam devices including, for example, a cooling stage for processing and observing a sample while cooling the sample, a multi-probe for analyzing electrical characteristics of a sample, and a nano-intender for analyzing mechanical characteristics of a sample.

#FIG. 1 is a perspective view for illustrating a configuration of a charged particle beam device according to an embodiment of the present invention.

#FIG. 2 is a partial cutaway view for illustrating a sample chamber and a replacement chamber of the charged particle beam device according to the embodiment of the present invention, as seen from the Z-axis direction.

#FIG. 3 is a perspective view for illustrating respective configurations of a stage and a sample holder of the charged particle beam device according to the embodiment of the present invention.

#Referring to the accompanying drawings, a sample holder and a charged particle beam device according to an embodiment of the present invention is described below.

#(Charged Particle Beam Device)

#FIG. 1 is a perspective view for illustrating a configuration of a charged particle beam device 10 according to an embodiment of the present invention. FIG. 2 is a partial cutaway view for illustrating a sample chamber 11 and a replacement chamber 18 of the charged particle beam device 10 according to the embodiment, as seen from the Z-axis direction. In the following, the X-axis, the Y-axis, and the Z-axis form a three-dimensional orthogonal coordinate system. Axial directions of the X-axis, Y-axis, and the Z-axis orthogonal to one another in a three-dimensional space are directions parallel to the corresponding axes. The X-axis direction and the Y-axis direction are parallel to a reference plane orthogonal to an up-and-down direction of the charged particle beam device 10 (for example, a horizontal plane). The Z-axis direction is parallel to the up-and-down direction of the charged particle beam device 10 (for example, a vertical direction orthogonal to the horizontal plane).