Control apparatus and control method, exposure apparatus and exposure method, device manufacturing method, data generating method and program

A control apparatus that is configured to control a spatial light modulator, the spatial light modulator being used for an exposure apparatus configured to transfer a pattern on an object and having a plurality of optical elements a state of each of which is allowed to be changed,

• the control apparatus being configured to set states of a plurality of optical elements located in a first area to a first distribution in which a first optical element in a first state and a second optical element in a second state that is different from the first state are distributed in a first distribution pattern, and
• the control apparatus being configured to set states of a plurality of optical elements located in a second area that is adjacent to the first area to a second distribution in which the first optical element and the second optical element are distributed in a second distribution pattern that is different from the first distribution pattern,
• wherein each of the first and second distribution patterns is a distribution pattern in which the first and second optical elements are alternately distributed along a first direction and a second direction that intersects with the first direction.

A control apparatus that is configured to control a spatial light modulator having a plurality of optical elements a state of each of which is allowed to be changed,

• the control apparatus being configured to set (i) states of a plurality of optical elements located in a first area on the spatial light modulator to a first distribution, in which a first optical element in a first state and a second optical element in a second state that is different from the first state are distributed in a first distribution pattern, and (ii) states of a plurality of optical elements located in a second area that is different from the first area on the spatial light modulator to a second distribution, in which the first optical element and the second optical element are distributed in a second distribution pattern that is different from the first distribution pattern, so that a first diffracted light generated from the first area and a second diffracted light generated from the second area weaken each other by interference,
• wherein each of the first and second distribution patterns is a distribution pattern in which the first and second optical elements are alternately distributed along a first direction and a second direction that intersects with the first direction.

A control apparatus that is configured to control a spatial light modulator having a plurality of optical elements a state of each of which is allowed to be changed and that are arranged in a first direction and a second direction that intersects with the first direction,

• the control apparatus being configured to set a plurality of optical elements located in a first area among the plurality of optical elements of the spatial light modulator so that an optical element in a first state and an optical element in a second state that is different from the first state are arranged on the basis of a first rule,
• the control apparatus being configured to set a plurality of optical elements located in a second area that is different from the first area among the plurality of optical elements of the spatial light modulator so that the optical element in the first state and the optical element in the second state are arranged on the basis of a second rule that is different from the first rule,
• when an area in which the optical elements in the first and second states are arranged on the basis of the first rule is expanded to include the second area, the state of an optical element in the area including the second area and the state of an optical element in the second area are different from each other.

A control apparatus that is configured to control a spatial light modulator having a plurality of optical elements a state of each of which is allowed to be changed and that are arranged in a first direction and a second direction that intersects with the first direction,

• the control apparatus being configured to set states of two optical elements among the plurality of optical elements so that an optical element in a first state and an optical element in a second state that is different from the first state line along a third direction,
• the control apparatus being configured to set states of different two optical elements that are different from the two optical elements among the plurality of optical elements so that the optical element in the second state and the optical element in the first state line along the third direction,
• the two optical elements being adjacent to the different two optical elements or an even number of rows of the optical elements being disposed between the two optical elements and the different two optical elements.