Pellicle for flat panel display photomask

A method of manufacturing a flat-panel display, comprising:

• disposing a large-size photomask between an optical energy source and a glass plate substrate, the large-size photomask comprising:
• a large-size photomask substrate;
• at least one circuit pattern formed on the large-size photomask substrate;
• a frame member;
• a substantially rigid and transparent pellicle membrane affixed to the frame member so as to protect at least a portion of the large-size photomask substrate from contamination during usage, storage and/or transport;
• and
• a coating on at least one of top and bottom surfaces of the pellicle membrane that binds the at least one of the top and bottom surfaces of the pellicle membrane to prevent separation of pellicle membrane material in the event of breakage;
• irradiating light from the optical energy source through the large-size photomask and onto the glass plate substrate in a photolithographic process so that the at least one circuit pattern is transferred from the large-size photomask to the glass plate substrate.