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US 11,537,046 B2Granted
Photoresist composition and photoresist film using the same
AssigneeLG Chem, Ltd.
InventorsEun Seok Park, Min Young Lim, Ji Hye Kim
Life of this patent
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Abstract
The present invention relates to a photoresist composition capable of realizing excellent pattern performance during formation of fine patterns, and of preparing a photoresist film that is excellent in chemical stability of a plating solution, and a photoresist film using the same.
Claims12
A photoresist composition comprising a photoacid generator, and a (meth)acrylic resin containing a (meth)acrylic repeating unit and a functional group represented by Chemical Formula 1 bonded to a terminal of a branched chain in the repeating unit:
- wherein, in the Chemical Formula 1,
- R1 and R2 are each independently hydrogen, a carboxyl group, a polyoxyalkylene-based functional group, an alkyl group having 1 to 20 carbon atoms, or an aryl group having 6 to 20 carbon atoms, or R1 and R2 form a cycloalkyl group having 3 to 20 carbon atoms,
- wherein the branched chain includes a functional group represented by Chemical Formula 2:
- wherein, in the Chemical Formula 2,
- R3 is an alkyl group having 1 to 20 carbon atoms, or an aryl group having 6 to 30 carbon atoms,
- L is a direct bond, —O—, —CO—, —S—, —SO2—, —C(CH3)2—, —C(CF3)2—, —CONH—, —COO—, —(CH2)y—, —O(CH2)yO—, —{(CH2)yO}p—, —NH—, —NH(CH2)y—NH—, —NH(CH2)yO—, —OCH2—C(CH3)2—CH2O—, —COO—(CH2)y—OCO—, or —OCO—(CH2)y—COO—, and
- y and p are each independently an integer of 1 to 10
- wherein the functional group of Chemical Formula 1 is bonded to R3 of the Chemical Formula 2, and
- wherein the (meth)acrylic repeating unit is represented by Chemical Formula 4:
- wherein, in Chemical Formula 4,
- R4 to R7 are each independently hydrogen or a methyl group,
- R8 is an alkyl group having 4 to 10 carbon atoms which can be deprotected by an acid,
- R9 is the functional group represented by the Chemical Formula 2,
- R10 is a cycloalkyl group having 3 to 20 carbon atoms, and
- a molar ratio of a:b:c:d is 3 to 6:0.5 to 2:2 to 5:1 to 5.
12 more elements
Dependencies are inferred from the claim text.