Imprint apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorYousuke Kondo
Life of this patent
Estimating the term…
Abstract
An imprint apparatus that forms a pattern made of an imprint material on each of a plurality of shot regions of a substrate, includes a user interface configured to allow a user to perform editing for assigning each of the plurality of shot regions to any one of a plurality of groups such that each of the plurality of groups is formed by at least one shot region onto which the imprint material is continuously supplied from a dispenser.
Claims19
An imprint apparatus that performs an imprint process of bringing a mold into contact with an imprint material on a substrate and curing the imprint material, the apparatus comprising:
- a controller configured to assign each of a plurality of shot regions of the substrate to any one of a plurality of groups;
- and
- a user interface configured to display information about the plurality of groups to which the plurality of shot regions have been assigned, and having an editing field for changing a group to which a shot region selected from the plurality of shot regions has been assigned,
- wherein the user interface has a field for setting an upper limit number of shot regions belonging to one group,
- wherein, in a case that the upper limit number is one, an imprint material is supplied, by a dispenser, onto one shot region which has been assigned to the one group, and then the imprint process is performed for the one shot region, and
- wherein, in a case that the upper limit number is at least two, an imprint material is supplied, by the dispenser, onto at least two of shot regions which have been assigned to the one group, and then the imprint process is performed for the at least two of shot regions.
An article manufacturing method comprising:
- forming a pattern on a substrate using an imprint apparatus;
- and manufacturing the article by processing the substrate on which the pattern has been formed in the forming,
- wherein the imprint apparatus performs an imprint process of bringing a mold into contact with an imprint material on the substrate and curing the imprint material, and comprises:
- a controller configured to assign each of a plurality of shot regions of the substrate to any one of a plurality of groups, and
- a user interface configured to display information about the plurality of groups to which the plurality of shot regions have been assigned, and having an editing field for changing a group to which a shot region selected from the plurality of shot regions has been assigned,
- wherein the user interface has a field for setting an upper limit number of shot regions belonging to one group,
- wherein, in a case that the upper limit number is one, an imprint material is supplied, by a dispenser, onto one shot region which has been assigned to the one group, and then the imprint process is performed for the one shot region,
- wherein, in case that the upper limit number is at least two, an imprint material is supplied, by the dispenser, onto at least two of shot regions which have been assigned to the one group, and then the imprint process is performed for the at least two of shot regions.
A control method of an imprint apparatus that performs an imprint process of bringing a mold into contact with an imprint material on a substrate and curing the imprint material, the method comprising:
- assigning each of a plurality of shot regions of the substrate to any one of a plurality of groups;
- displaying, on a user interface, information about the plurality of groups to which the plurality of shot regions have been assigned;
- and
- changing a group to which a shot region selected from the plurality of shot regions has been assigned, in accordance with an instruction given from a user through the user interface,
- wherein the user interface has a field for setting an upper limit number of shot regions belonging to one group,
- wherein, in a case that the upper limit number is one, an imprint material is supplied, by a dispenser, onto one shot region which has been assigned to the one group, and then the imprint process is performed for the one shot region,
- wherein, in case that the upper limit number is at least two, an imprint material is supplied, by the dispenser, onto at least two of shot regions which have been assigned to the one group, and then the imprint process is performed for the at least two of shot regions.
A non-transitory computer readable medium storing a program that controls an imprint apparatus that performs an imprint process of bringing a mold into contact with an imprint material on a substrate and curing the imprint material, the program causing a computer to perform:
- assigning each of a plurality of shot regions of the substrate to any one of a plurality of groups;
- displaying, on a user interface, information about the plurality of groups to which the plurality of shot regions have been assigned;
- and
- changing a group to which a shot region selected from the plurality of shot regions has been assigned, in accordance with an instruction given from a user through the user interface,
- wherein the user interface has a field for setting an upper limit number of shot regions belonging to one group,
- wherein, in a case that the upper limit number is one, an imprint material is supplied, by a dispenser, onto one shot region which has been assigned to the one group, and then the imprint process is performed for the one shot region,
- wherein, in case that the upper limit number is at least two, an imprint material is supplied, by the dispenser, onto at least two of shot regions which have been assigned to the one group, and then the imprint process is performed for the at least two of shot regions.
Dependencies are inferred from the claim text.