Multi-spot scanning device, system and method

A confocal microscope device for scanning a two-dimensional array of illumination beams over a target surface and scanning a corresponding two-dimensional array of emission beams stimulated by the array of illumination beams on to a sensor of an imaging device, the device comprising:

• first scanning optics operable to scan the array of illumination beams over the target surface along a first axis and scan the array of emission beams over the sensor along the first axis, and
• second scanning optics operable to:
• deflect, on a second axis, the array of illumination beams as they are scanned over the target surface along the first axis, such that uneven stimulation of the target surface by the array of illumination beams due to interference of the illumination beams is reduced, and
• deflect, on the second axis, the array of emission beams as they are scanned over the sensor of the imaging device along the first axis such that uneven stimulation of the sensor by the array of emission beams due to interference of the emission beams is reduced, wherein
• the second scanning optics comprises:
• a first scanning optical element to deflect on the second axis the array of illumination beams as they are scanned over the target surface along the first axis, and
• a second scanning optical element to deflect, on the second axis, the array of emission beams as they are scanned over the sensor of the imaging device along the first axis, wherein movement of the first scanning optical element and second scanning optical element is synchronised.