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US 11,536,952 B2Granted
Scanning mirror system with attached coil
AssigneeMicrovision, Inc.
InventorEllis Matthew
Life of this patent
Estimating the term…
Abstract
A light detection and ranging system includes synchronously scanning transmit and receive mirrors that scan a pulsed fanned laser beam in two dimensions. Imaging optics image a receive aperture onto an arrayed receiver that includes a plurality of light sensitive devices. Scanning mirror assemblies include stationary permanent magnets and MEMS devices with attached mirrors and conductive coils.
Claims20
A scanning mirror assembly comprising:
- a micro-machined device having fixed platforms and a scanning platform coupled to the fixed platforms by flexures;
- a mirror affixed to the scanning platform above the fixed platform;
- a stationary permanent magnet positioned below the fixed platform, the stationary permanent magnet producing a second magnetic field;
- and
- a conductive coil affixed to the scanning platform below the fixed platform, the stationary permanent magnet being positioned at least partially within an interior volume of the conductive coil, the conductive coil producing a first magnetic field in response to a drive current applied to the conductive coil, where the first magnetic field interacts with the second magnetic field to create a force on the conductive coil that results in motion of the conductive coil, scanning platform, and the mirror.
2 more elements
A light detection and ranging system comprising:
- a laser light source to produce laser light pulses;
- a first scanning mirror assembly to scan the laser light pulses in a first dimension in a field of view, wherein the first scanning mirror assembly includes a scanning platform, a conductive coil affixed to the scanning platform, the conductive coil configured to produce a first magnetic field in response to a drive current applied to the conductive coil, and a stationary permanent magnet occupying space in an internal volume of the conductive coil, the stationary permanent magnet producing a second magnetic field that interacts with the first magnetic field to create a force on the conductive coil that results in motion of the conductive coil and the scanning platform;
- a light sensitive device to detect reflections of the laser light pulses;
- and
- a time-of-flight measurement circuit responsive to the light sensitive device.
2 more elements
A light detection and ranging system comprising:
- at least one laser light source to emit laser light pulses in a fanned beam;
- first and second scanning mirror assemblies to scan the fanned beam in two dimensions in a field of view, wherein each of the first and second scanning mirror assemblies includes a scanning platform, a mirror affixed to a first side of the scanning platform, and a conductive coil affixed to a second side of the scanning platform, the conductive coil configured to produce a first magnetic field in response to a drive current applied to the conductive coil, and a stationary permanent magnet positioned at least partially within an interior volume of the conductive coil, the stationary permanent magnet producing a second magnetic field that interacts with the first magnetic field to create a force on the conductive coil that results in motion of the conductive coil, scanning platform, and the mirror;
- an array of light sensitive devices to receive reflections of the laser light pulses;
- third and fourth scanning mirror assemblies to synchronously scan with the first and second scanning mirror assemblies and direct the reflections of the laser light pulses onto the array of light sensitive devices;
- and
- a plurality of time-of-flight measurement circuits responsive to the array of light sensitive devices.
3 more elements
Dependencies are inferred from the claim text.