Resonant frequency tuning of micromachined mirror assembly
AssigneeBeijing Voyager Technology Co., Ltd.
InventorsSae Won Lee, Youmin Wang, Qin Zhou
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Abstract
Embodiments of the disclosure provide a micromachined mirror assembly. The micromachined mirror assembly includes a micro mirror configured to tilt around an axis and a first and a second torsion beam each having a first and a second end. The second end of the first torsion beam and the second end of the second torsion beam are mechanically coupled to the micro mirror along the axis. The micromachined mirror assembly also includes a first DC voltage applied to the first end of the first torsion beam and a second DC voltage, different from the first DC voltage, is applied to the first end of the second torsion beam.
Claims20
A micromachined mirror assembly, comprising:
- a micro mirror configured to tilt around an axis;
- and
- a first and a second torsion beam each having a first and a second end;
- wherein the second end of the first torsion beam and the second end of the second torsion beam are mechanically coupled to the micro mirror along the axis;
- a first voltage applied to the first end of the first torsion beam;
- and
- a second voltage, different from the first voltage, is applied to the first end of the second torsion beam,
- wherein a voltage difference between the first voltage applied to the first torsion beam and the second voltage applied to the second torsion beam is adjusted to change a resonant frequency of the micro mirror.
A micromachined mirror assembly, comprising:
- a micro mirror configured to tilt around an axis;
- a first torsion beam and a second torsion beam each mechanically coupled to the micro mirror along the axis;
- a first torsional actuator mechanically coupled to the first torsion beam and configured to apply a first torsional stress around the axis to the first torsion beam;
- and
- a second actuator mechanically coupled to the second torsion beam and configured to apply a second torsional stress around the axis to the second torsion beam,
- wherein a DC voltage difference applied between the first torsion beam and the second torsion beam is adjusted to change a resonant frequency of the micro mirror.
A method for driving a micromachined mirror assembly, comprising:
- setting a resonant frequency of the micromachined mirror assembly at an initial value;
- and
- applying a DC voltage difference along an axis of the micromachined mirror assembly to decrease the resonant frequency to a first operational value lower than the initial value during operation of the micromachined mirror assembly.
Dependencies are inferred from the claim text.