Edge couplers with metamaterial rib features
AssigneeGlobalFoundries U.S. Inc.
InventorYusheng Bian
Life of this patent
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Abstract
Structures for an edge coupler and methods of fabricating a structure for an edge coupler. A waveguide core includes a waveguide core section that has a first notched sidewall, a second notched sidewall, and an end surface connecting the first notched sidewall to the second notched sidewall. Segments are positioned with a spaced arrangement adjacent to the end surface of the waveguide core section, and a slab layer is adjoined to the segments, the first notched sidewall of the waveguide core section, the second notched sidewall of the waveguide core section, and the end surface of the waveguide core section. The segments and the waveguide core section have a first thickness, and the slab layer has a second thickness that is less than the first thickness.
Claims20
A structure for an edge coupler, the structure comprising:
- a waveguide core including a first waveguide core section, the first waveguide core section having an end surface;
- a first plurality of segments positioned with a first spaced arrangement adjacent to the end surface of the first waveguide core section;
- and
- a slab layer adjoined to the first plurality of segments and the end surface of the first waveguide core section, the slab layer having a first side edge, a second side edge, and a first portion connected to the first plurality of segments, and the first portion of the slab layer tapered with a first width dimension between the first side edge and the second side edge that increases with decreasing distance from the first waveguide core section,
- wherein the first plurality of segments are laterally positioned between the first side edge and the second side edge, the first plurality of segments and the first waveguide core section have a first thickness, and the slab layer has a second thickness that is less than the first thickness.
A method of forming a structure for an edge coupler, the method comprising:
- forming a waveguide core including a first waveguide core section, wherein the first waveguide core section has an end surface;
- forming a first plurality of segments positioned with a first spaced arrangement adjacent to the end surface of the first waveguide core section;
- and
- forming a slab layer adjoined to the first plurality of segments and the end surface of the first waveguide core section,
- wherein the slab layer has a first side edge, a second side edge, and a first portion connected to the first plurality of segments, the first plurality of segments are laterally positioned between the first side edge and the second side edge, the first portion of the slab layer is tapered with a first width dimension between the first side edge and the second side edge that increases with decreasing distance from the first waveguide core section, the first plurality of segments and the first waveguide core section have a first thickness, and the slab layer has a second thickness that is less than the first thickness.
Dependencies are inferred from the claim text.