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US 11,536,768 B2Granted
Inspection apparatus
AssigneeTokyo Electron Limited
InventorHiroyuki Nakayama
Life of this patent
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Abstract
An inspection apparatus includes a stage on which a substrate is placed, a cooler, a probe card, a light irradiator and a controller. The cooler cools the substrate placed on the stage. The probe card has probes to be in contact with the substrate to supply electric power. The light irradiator irradiates light to an upper surface of the substrate, opposite to a bottom surface of the substrate placed on the stage. Further, the controller controls the light irradiator.
Claims6
An inspection apparatus comprising:
- a stage on which a substrate is placed;
- a cooler to cool the substrate placed on the stage;
- a probe card having probes to be in contact with the substrate to supply electric power;
- a light irradiator to irradiate light to an upper surface of the substrate, opposite to a bottom surface of the substrate placed on the stage;
- and
- a controller to control the light irradiator,
- wherein the light irradiator includes multiple light sources, and the light sources are arranged in multiple rows in a radial direction at outer peripheries of the probes, and
- wherein the controller controls the light amount of each of the light sources by dividing the light sources arranged in the multiple rows into an inner peripheral side light source group and an outer peripheral side light source group, and controls the light amount distribution of the light irradiator.
5 more elements
Dependencies are inferred from the claim text.