US 11,536,755 B2 · System and method for arc detection using a bias RF generator signal

Abstract

An arc detector for a RF power supply system, where the RF power supply incudes a first RF power supply and a second RF power supply. A signal applied to a non-linear load varies in accordance with an output from one of the first RF power supply or the second RF power supply. The signal has a frequency. During an arc or arc condition in the non-linear load, the frequency of the signal changes, and if the frequency is outside of a selected range, an arc or arc condition is indicated. The frequency can be determined by digitizing the signal into a series of pulses and measuring a time or period between pulses.

Claims24

Dependent claims

An arc detection system comprising:

a level detector module configured to generate a level signal in accordance with an AC signal applied to a non-linear load, wherein the level signal includes at least one of a first state or a second state in accordance with a magnitude of the AC signal;
and
a timer module configured to receive the level signal and to generate a timing signal in accordance with a duration of one of the first state or the second state of the level signal,
wherein an arc condition in the non-linear load is indicated when the timing signal meets a selected criteria.

1 more element

A RF power generator system comprising:

a first RF power source configured to generate a first RF signal to a non-linear load;
a second RF power source configured to generate a second RF signal to the load;
and
an arc detector configured to receive a sense signal that varies in accordance with the first RF signal, the arc detector further configured to:
determine whether a frequency of the sense signal is one of less than a first selected threshold or greater than a second selected threshold;
and
indicate an arc condition when the frequency of the sense signal is one of less than the first selected threshold or greater than the second selected threshold.

4 more elements

Dependencies are inferred from the claim text.

Facts

Application

16/887,346Filed 29 May 2020

Published

US 2021/0373054 A12 Dec 2021

Granted

27 Dec 2022

Term ends

Not estimatedThe source records don’t support an estimate.

Classification12 codes

G01R 23/16
Arrangements for measuring frequencies; Arrangements for analysing frequency spectra: spectrum analysis; Fourier analysis
G01R 29/02
Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00: measuring characteristics of individual…
G01R 31/14
Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an…
H01J 37/32091
Radio frequency generated discharge: the radio frequency energy being capacitively coupled to the plasma

System and method for arc detection using a bias RF generator signal

Life of this patent

System and method for arc detection using a bias RF generator signal

Life of this patent

Abstract

Claims24