Image inspection apparatus and image inspection method

An image inspection apparatus comprising:

• an image capturing unit which captures images of an object;
• a transparent illumination unit which is disposed between the object and the image capturing unit, has a light-emitting surface which radiates light to the object and is configured to be able to control a light-emitting position on the light-emitting surface and a radiation direction of the light;
• and
• a processor which is configured to control the image capturing unit and the illumination unit,
• wherein the processor causes the illumination unit to radiate light to the object in a first direction and causes the light to scan by changing the light-emitting position on the light-emitting surface in first scanning of the illumination unit, and causes the image capturing unit to capture images of the object during the first scanning, and
• the processor causes the illumination unit to radiate light to the object in a second direction reverse to the first direction and causes the light to scan by changing the light-emitting position on the light-emitting surface in second scanning of the illumination unit, and causes the image capturing unit to capture images of the object during the second scanning, and
• wherein the processor identifies the light-emitting position of the illumination unit when a measurement point of the surface of the object is illuminated from images of the object captured during the first scanning and the second scanning, and calculates a distance to the measurement point on the basis of the identified light-emitting position, the first direction and the second direction.