Gas detection device

A gas detection device, comprising:

• a substrate comprising a microelectromechanical-element region, a particle-sensing region, a gas-sensing region and a driving-element region, wherein at least one inlet aperture is formed in the microelectromechanical-element region by an etching process;
• a microelectromechanical element, manufactured by a semiconductor process, stacked and integrally formed on the microelectromechanical-element region of the substrate, and corresponding to the at least one inlet aperture to actuate transportation of gas;
• a light-emitting element, manufactured by a semiconductor process, and stacked and integrally formed on the particle-sensing region of the substrate to emit a light beam;
• a particle-sensing element, manufactured by a semiconductor process, stacked and integrally formed on the particle-sensing region of the substrate, and spaced apart from the light-emitting element, so as to receive scattered light spots generated by the light beam of the light-emitting element irradiating on the gas to achieve a detection of suspended particles;
• a gas-sensing element, manufactured by a semiconductor process, stacked and integrally formed on the gas-sensing region to detect the gas passing therethrough;
• a driving-chip element, manufactured by a semiconductor process, stacked and integrally formed on the driving-element region, wherein the driving-chip element is electrically connected to the microelectromechanical element, the light-emitting element, the particle-sensing element and the gas-sensing element, and comprises a microprocessor;
• and
• an encapsulation layer encapsulated and positioned on the substrate, wherein a flowing-channel space is formed above the microelectromechanical element, the light-emitting element and the gas-sensing element, and at least one outlet aperture and a light-admitting aperture are formed in the encapsulation layer by an etching process;
• wherein the microprocessor of the driving-chip element controls driving operations of the microelectromechanical element, the light-emitting element, the particle-sensing element and the gas-sensing element, respectively, wherein the microelectromechanical element is enabled to actuate the transportation of the gas, the gas is introduced into the flowing-channel space through the at least one inlet aperture of the substrate, the scatted light spots are generated by the light beam of the light-emitting element irradiating on the suspended particles, the particle-sensing element receives the scatted light spots to obtain a detection datum of the suspended particles, the gas-sensing element detects the gas passing therethrough to obtain a detection datum of hazardous gas, and finally the gas is discharged through the outlet aperture of the encapsulation layer.