Integrated particulate matter sensor systems

A method of making a particulate matter sensor system, the method comprising:

• disposing a particulate matter sensor on a substrate, including electrically connecting an integrated circuit device of the particulate matter sensor to the substrate;
• disposing a fluid circulation device on the substrate;
• and
• positioning a cover on the substrate to define an interior space between the cover and the substrate, the particulate matter sensor and the fluid circulation device being contained within the interior space, the cover defining at least a portion of a flow path through the particulate matter sensor system,
• wherein the interior space between the cover and the substrate is sized so as to dampen a fluid flow fluctuation induced by the fluid circulation device.

A method of sensing particulate matter in a fluid using a particulate matter sensor system, the method comprising:

• flowing the fluid through a flow path through the particulate matter sensor system by operating a fluid circulation device disposed on a substrate, at least a portion of the flow path being defined by a cover of the particulate matter sensor system, including:
• flowing the fluid through a particulate matter sensor disposed in an interior space between the cover and the substrate, the particulate matter sensor comprising an integrated sensor device electrically connected to the substrate,
• wherein the interior space between the cover and the substrate is sized so as to dampen a fluid flow fluctuation induced by the fluid circulation device;
• and
• detecting an amount of particulate matter in the fluid by the particulate matter sensor.