Analysis apparatus, analysis method, and interference measurement system

An interference measurement system comprising an interference measurement apparatus and an analysis apparatus, wherein:

• the interference measurement apparatus includes:
• a light source part that irradiates a surface of an object to be measured with a laser light;
• a reference surface that is movably provided on an optical axis of the laser light;
• an image capturing part that captures an interference image of reference light reflected at the reference surface and measurement light reflected at the surface of the object to be measured, and wherein
• the analysis apparatus includes:
• an acquisition part that acquires a plurality of the interference images based on a plurality of optical path lengths between the reference surface and the surface of the object to be measured from the interference measurement apparatus;
• a calculation part that calculates a sine wave component and a cosine wave component of an interference signal for each pixel in the plurality of the interference images, respectively;
• an error detection part that detects an error between a first Lissajous figure constructed on the basis of the sine wave component and the cosine wave component for each pixel and an ideal second Lissajous figure;
• a correction part that corrects the sine wave component and the cosine wave component for each pixel on the basis of the error;
• and
• a geometry calculation part that calculates surface geometry of the object to be measured on the basis of the corrected sine wave component and cosine wave component.