Micro fluid actuator

A micro fluid actuator comprising:

• at least one substrate having at least one first surface, at least one second surface, at least one outlet groove, at least one inlet groove, at least one outflow aperture, a plurality of first inflow apertures and at least one second inflow aperture, wherein the outlet groove, the inlet groove, the outflow aperture, the plurality of first inflow apertures and the second inflow aperture are formed by an etching process, the outlet groove is in fluid communication with the outflow aperture, and the inlet groove is in fluid communication with the plurality of first inflow apertures and the second inflow aperture;
• at least one chamber layer formed on the first surface of the substrate by a deposition process, and is etched to form at least one storage chamber, wherein the storage chamber is in fluid communication with the outflow aperture, the plurality of first inflow apertures and the second inflow aperture;
• at least one vibration layer formed on the chamber layer by the deposition process;
• at least one lower electrode layer formed on the vibration layer by the deposition process and the etching process;
• at least one piezoelectric actuation layer formed on the lower electrode layer by the deposition process and the etching process;
• at least one upper electrode layer formed on the piezoelectric actuation layer by the deposition process and the etching process;
• at least one orifice layer having at least one outflow opening and at least one inflow opening formed by the etching process;
• and
• at least one flow channel layer formed on the orifice layer by a rolling process with at least one dry film material, wherein at least one outflow channel, at least one inflow channel and a plurality of columnar structures are formed by a lithography process, wherein the flow channel layer is mounted onto the second surface of the substrate by a flip-chip alignment process and a hot-pressing process, wherein the outflow opening of the orifice layer is in fluid communication with the outlet groove of the substrate through the outflow channel, and wherein the inflow opening of the orifice layer is in fluid communication with the inlet groove of the substrate through the inflow channel;
• wherein driving power which have different phases are provided to the upper electrode layer and the lower electrode layer, so as to drive and control the vibration layer to displace in a reciprocating manner, so that fluid is inhaled through the inflow opening, flows into the storage chamber through the plurality of first inflow apertures and the second inflow aperture, is compressed to flow through the outflow aperture and is then discharged out from the outflow opening to achieve fluid transportation.