Fluid control device
AssigneeFujikin Incorporated
InventorsRyutaro Tanno, Tsutomu Shinohara, Yuya Suzuki, Hidenori Kiso, Yoshiaki Watanabe
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AssigneeFujikin Incorporated
InventorsRyutaro Tanno, Tsutomu Shinohara, Yuya Suzuki, Hidenori Kiso, Yoshiaki Watanabe
Estimating the term…
A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.
A fluid control device, detecting pressure in a closed space isolated from a flow path, comprising:
Dependencies are inferred from the claim text.