Vacuum pump, magnetic bearing device, and rotor
AssigneeEdwards Japan Limited
InventorToshiaki Kawashima
Life of this patent
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Abstract
Provided are a vacuum pump, a magnetic bearing device, and a rotor that suppress swinging and vibration of a rotor. A vacuum pump includes, in the following order in the exhaust direction of a gas, the center of gravity of a rotor, an active radial bearing that supports the rotor in the radial direction in a non-contact manner by using a magnetic force, and a passive radial bearing that supports the rotor in the radial direction in a non-contact manner using a magnetic force.
Claims9
A vacuum pump provided with a magnetic bearing device, the vacuum pump comprising:
- a plurality of radial magnetic force generation means for supporting a rotor for exhausting gas in a radial direction in a non-contact manner by using a magnetic force;
- and
- a radial displacement detection means for detecting displacement of the rotor in the radial direction, wherein
- two of the radial magnetic force generation means are provided on an outlet port side with respect to a center of gravity of the rotor in an exhaust direction of the gas,
- the radial magnetic force generation means disposed on an inlet port side is controlled based on a detection value of the radial displacement detection means, and
- the radial displacement detection means is provided on the outlet port side with respect to the center of gravity of the rotor in the exhaust direction of the gas.
A magnetic bearing device for use in a vacuum pump, the magnetic bearing device comprising:
- a plurality of radial magnetic force generation means for supporting a rotor for exhausting gas in a radial direction in a non-contact manner by using a magnetic force;
- and
- a radial displacement detection means for detecting displacement of the rotor in the radial direction, wherein
- two of the radial magnetic force generation means are provided on an outlet port side with respect to a center of gravity of the rotor in an exhaust direction of the gas,
- the radial magnetic force generation means disposed on an inlet port side is controlled based on a detection value of the radial displacement detection means, and
- the radial displacement detection means is provided on the outlet port side with respect to the center of gravity of the rotor in the exhaust direction of the gas.
A rotor for use in a vacuum pump, the vacuum pump comprising
- a plurality of radial magnetic force generation means for supporting a rotor for exhausting gas in a radial direction in a non-contact manner by using a magnetic force;
- and
- a radial displacement detection means for detecting displacement of the rotor in the radial direction, wherein
- the rotor has a center of gravity located on an inlet port side with respect to two of the radial magnetic force generation means in an exhaust direction of the gas,
- the radial magnetic force generation means disposed on the inlet port side is controlled based on a detection value of the radial displacement detection means, and
- the radial displacement detection means is provided on an outlet port side with respect to the center of gravity of the rotor in the exhaust direction of the gas.
Dependencies are inferred from the claim text.